Throughout the 1960s and 1970s, Miller continued to write prolifically, though none of his later plays achieved the same level of success as his earlier works. Notable plays from this period include "Incident at Vichy" (1964), which deals with the Holocaust, and "The Price" (1968), a family drama that was more warmly received than some of his other later works.

In 1962, Miller married photographer Inge Morath. They had two children together, Rebecca and Daniel. Their marriage lasted until Morath's death in 2002.