Current-generation EUV tools consume up to 1,170 kilowatts, while next-generation High NA EUV scanners are expected to reach power consumption levels of around 1,400 kilowatts.
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Current-generation EUV tools consume up to 1,170 kilowatts, while next-generation High NA EUV scanners are expected to reach power consumption levels of around 1,400 kilowatts.